Invention Grant
- Patent Title: Method of surface tension control to reduce trapped gas bubbles
- Patent Title (中): 表面张力控制方法,以减少被困的气泡
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Application No.: US13362972Application Date: 2012-01-31
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Publication No.: US09278857B2Publication Date: 2016-03-08
- Inventor: Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
- Applicant: Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology Inc.
- Current Assignee: Seagate Technology Inc.
- Current Assignee Address: US CA Cupertino
- Main IPC: B82Y40/00
- IPC: B82Y40/00 ; G03F7/00 ; B82Y10/00 ; B05D3/12 ; B05D3/10

Abstract:
The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.
Public/Granted literature
- US20130196122A1 METHOD OF SURFACE TENSION CONTROL TO REDUCE TRAPPED GAS BUBBLES Public/Granted day:2013-08-01
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