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US09278865B2 Method for producing hexachlorodisilane 有权
六氯二硅烷的制备方法

Method for producing hexachlorodisilane
Abstract:
A method produces hexachlorodisilane. Hexachlorodisilane is obtained by oxidative splitting of the chlorinated polysilane of the empirical formula SiClx (x=0,2-0,8) using chlorine gas. The hexachlorodisilane is selectively obtained with a high yield.
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