Invention Grant
- Patent Title: Device having a membrane structure for detecting thermal radiation, and method for production thereof
- Patent Title (中): 具有用于检测热辐射的膜结构的装置及其制造方法
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Application No.: US12601556Application Date: 2008-05-28
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Publication No.: US09279730B2Publication Date: 2016-03-08
- Inventor: Carsten Giebeler , Matthias Schreiter , Christian Paulus
- Applicant: Carsten Giebeler , Matthias Schreiter , Christian Paulus
- Applicant Address: GB Edinburgh
- Assignee: Pyreos, Ltd.
- Current Assignee: Pyreos, Ltd.
- Current Assignee Address: GB Edinburgh
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102007024902 20070529
- International Application: PCT/EP2008/004246 WO 20080528
- International Announcement: WO2008/145353 WO 20081204
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J5/34 ; G01J5/14 ; G01J5/22 ; G01J5/04 ; G01N21/01 ; H01L27/146 ; H01L41/09 ; G01J5/00 ; G01J5/20

Abstract:
In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalized silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.
Public/Granted literature
- US20110006211A1 DEVICE HAVING A MEMBRANE STRUCTURE FOR DETECTING THERMAL RADIATION, AND METHOD FOR PRODUCTION THEREOF Public/Granted day:2011-01-13
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