Invention Grant
- Patent Title: Micromachined gyroscope including a guided mass system
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Application No.: US14472143Application Date: 2014-08-28
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Publication No.: US09291456B2Publication Date: 2016-03-22
- Inventor: Joseph Seeger , Ozan Anac
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Sawyer Law Group, P.C.
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5733 ; G01C19/574 ; G01C19/5755 ; G01C19/5712

Abstract:
A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.
Public/Granted literature
- US09395183B2 Micromachined gyroscope including a guided mass system Public/Granted day:2016-07-19
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