Invention Grant
- Patent Title: Shape measuring apparatus, and method of manufacturing article
- Patent Title (中): 形状测量装置及其制造方法
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Application No.: US14534619Application Date: 2014-11-06
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Publication No.: US09297745B2Publication Date: 2016-03-29
- Inventor: Akihiro Hatada , Yoshiyuki Kuramoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-236264 20131114
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01N21/21 ; G01B11/25

Abstract:
The present invention provides a measuring apparatus which measures a shape of an object to be measured, comprising an emitting unit configured to emit pattern light, an optical system configured to irradiate the object with the pattern light emitted from the emitting unit, a deflection unit configured to deflect light emitted from the optical system, an image sensing unit configured to sense an image of the object irradiated with the pattern light, and a processing unit configured to determine the shape of the object based on the image of the object sensed by the image sensing unit, wherein the deflection unit includes a deflection element, wherein the measuring apparatus irradiates the object with light deflected by the deflection element, and a direction deflected by the deflection element differs depending on a polarization state of incident light in the deflection element.
Public/Granted literature
- US20150131096A1 MEASURING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-05-14
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