Invention Grant
US09304078B2 Electron gun abnormality detecting device and electron gun abnormality detecting method 有权
电子枪异常检测装置和电子枪异常检测方法

Electron gun abnormality detecting device and electron gun abnormality detecting method
Abstract:
An electron gun abnormality detecting device for detecting an abnormality in first and second electron guns of a magnetic domain refining device for an electrical steel sheet includes: a magnetooptic element configured to contact with and separate from an inspection region set to include a boundary between a magnetic domain discontinuity generated by irradiation of a surface of the electrical steel sheet with an electron beam by the first electron gun and a magnetic domain discontinuity generated by irradiation thereof with an electron beam by the second electron gun, and configured to detect a steel sheet magnetic domain structure in the inspection region as an optical property; a light source configured to irradiate the magnetooptic element with linearly polarized light; and a detector configured to detect polarized light rotated by the steel sheet magnetic domain structure transferred to the magnetooptic element.
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