Invention Grant
US09305741B2 Desktop electron microscope and wide range tunable magnetic lens thereof
有权
台式电子显微镜及其宽范围可调谐磁性透镜
- Patent Title: Desktop electron microscope and wide range tunable magnetic lens thereof
- Patent Title (中): 台式电子显微镜及其宽范围可调谐磁性透镜
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Application No.: US14531011Application Date: 2014-11-03
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Publication No.: US09305741B2Publication Date: 2016-04-05
- Inventor: Wei-Yu Chang , Fu-Rong Chen , Te-Hui Lee , Tsu-Wei Huang
- Applicant: NATIONAL TSING HUA UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL TSING HUA UNIVERSITY
- Current Assignee: NATIONAL TSING HUA UNIVERSITY
- Current Assignee Address: TW Hsinchu
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: TW103127296A 20140808
- Main IPC: H01J37/141
- IPC: H01J37/141 ; H01J37/26 ; H01J37/145

Abstract:
A wide range tunable magnetic lens for the desktop electron microscope is provided. The wired range tunable magnetic lens comprises a coil support, an inner pole piece, a permanent-magnet, a first outer pole piece and a second outer pole piece. The inner pole piece covers the coil support and forms a first magnetic-circuit gap. The permanent-magnet forms a ring structure according to the central axis and is disposed at the outer side of the inner pole piece away from the central axis. The first outer pole piece is adjacently disposed at the upper-side of the permanent-magnet and extends to the central hole of the coil support. The second outer pole piece is adjacently disposed at the under-side of the permanent-magnet and extends to the central hole of the coil support, wherein the first outer pole piece and the second outer pole piece forms a second magnetic-circuit gap.
Public/Granted literature
- US20160042910A1 DESKTOP ELECTRON MICROSCOPE AND WIDE RANGE TUNABLE MAGNETIC LENS THEREOF Public/Granted day:2016-02-11
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