Invention Grant
US09306063B2 Vertical transistor devices for embedded memory and logic technologies
有权
用于嵌入式存储器和逻辑技术的垂直晶体管器件
- Patent Title: Vertical transistor devices for embedded memory and logic technologies
- Patent Title (中): 用于嵌入式存储器和逻辑技术的垂直晶体管器件
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Application No.: US14039696Application Date: 2013-09-27
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Publication No.: US09306063B2Publication Date: 2016-04-05
- Inventor: Brian S. Doyle , Uday Shah , Roza Kotlyar , Charles C. Kuo
- Applicant: Brian S. Doyle , Uday Shah , Roza Kotlyar , Charles C. Kuo
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L31/072
- IPC: H01L31/072 ; H01L29/78 ; H01L29/66 ; H01L29/49 ; H01L29/10 ; H01L29/161 ; H01L29/165 ; H01L29/201 ; H01L29/205

Abstract:
Vertical transistor devices are described. For example, in one embodiment, a vertical transistor device includes an epitaxial source semiconductor region disposed on a substrate, an epitaxial channel semiconductor region disposed on the source semiconductor region, an epitaxial drain semiconductor region disposed on the channel semiconductor region, and a gate electrode region surrounding sidewalls of the semiconductor channel region. A composition of at least one of the semiconductor regions varies along a longitudinal axis that is perpendicular with respect to a surface of the substrate.
Public/Granted literature
- US20150091058A1 VERTICAL TRANSISTOR DEVICES FOR EMBEDDED MEMORY AND LOGIC TECHNOLOGIES Public/Granted day:2015-04-02
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