Invention Grant
- Patent Title: Stain compensation in transistors
- Patent Title (中): 晶体管中的污染补偿
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Application No.: US14825130Application Date: 2015-08-12
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Publication No.: US09306068B2Publication Date: 2016-04-05
- Inventor: Van H. Le , Benjamin Chu-Kung , Harold Hal W. Kennel , Willy Rachmady , Ravi Pillarisetty , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/66 ; H01L29/78 ; H01L29/165 ; H01L21/283 ; H01L29/10

Abstract:
Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.
Public/Granted literature
- US20150380557A1 STAIN COMPENSATION IN TRANSISTORS Public/Granted day:2015-12-31
Information query
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