Invention Grant
- Patent Title: Light signal detecting circuit, light amount detecting device, and charged particle beam device
- Patent Title (中): 光信号检测电路,光量检测装置和带电粒子束装置
-
Application No.: US14407768Application Date: 2013-06-14
-
Publication No.: US09322711B2Publication Date: 2016-04-26
- Inventor: Fujio Onishi , Hiroshi Touda , Tetsuji Osawa , Yuki Sugawara
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2012-135770 20120615
- International Application: PCT/JP2013/066502 WO 20130614
- International Announcement: WO2013/187511 WO 20131219
- Main IPC: H01J37/24
- IPC: H01J37/24 ; G01J1/44 ; G01J1/42 ; H01J37/244 ; G01N23/225 ; H03F3/08 ; G01N21/64

Abstract:
A light signal detecting circuit, a light amount detecting device, and a charged-particle-beam device capable of discriminating the signal component of a small amount of light from the signal component of noise due to dark current. A data-processing-unit detects pulses from digital voltage signal corresponding to an amount of light obtained by an amplifier and an A-D converter, calculates a crest value as the maximum voltage value of each pulse, and stores the occurrence frequency of each calculated crest value in a frequency occurrence storage area. A data analysis unit compares a previously-determined frequency lower limit with the occurrence frequency of each crest value in ascending order of the crest values and sets a pulse determination threshold to the first crest value whose occurrence frequency is equal to or smaller than the frequency lower limit. The threshold processing unit thus outputs the digital signal higher than the pulse determination threshold.
Public/Granted literature
- US20150153223A1 LIGHT SIGNAL DETECTING CIRCUIT, LIGHT AMOUNT DETECTING DEVICE, AND CHARGED PARTICLE BEAM DEVICE Public/Granted day:2015-06-04
Information query