Invention Grant
US09327965B2 Transportation device having a monolithically integrated multi-sensor device on a semiconductor substrate and method therefor 有权
在半导体衬底上具有单片集成多传感器装置的运输装置及其方法

Transportation device having a monolithically integrated multi-sensor device on a semiconductor substrate and method therefor
Abstract:
A transportation device is provided having multiple sensors configured to detect and measure different parameters of interest. The transportation device includes at least one monolithic integrated multi-sensor (MIMS) device. The MIMS device comprises at least two sensors of different types formed on a common semiconductor substrate. For example, the MIMS device can comprise an indirect sensor and a direct sensor. The transportation device couples a first parameter to be measured directly to the direct sensor. Conversely, the transportation device can couple a second parameter to be measured to the indirect sensor indirectly. Other sensors can be added to the transportation device by stacking a sensor to the MIMS device or to another substrate coupled to the MIMS device. This supports integrating multiple sensors such as a microphone, an accelerometer, and a temperature sensor to reduce cost, complexity, simplify assembly, while increasing performance.
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