A measurement auxiliary circuit is configured to form a resonance circuit together with a detection target. An ATAC is coupled with the resonance circuit. A signal generator applies an AC probe signal VS to the resonance circuit. After the impedance measurement apparatus enters a stable state, an impedance detection unit measures a voltage at at least one node and/or a current that flows through at least one current path. The impedance detection unit detects the impedance of the detection target based on the measurement value.