Invention Grant
- Patent Title: Inertial sensor and method of levitation effect compensation
- Patent Title (中): 惯性传感器和悬浮效应补偿方法
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Application No.: US13687299Application Date: 2012-11-28
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Publication No.: US09335170B2Publication Date: 2016-05-10
- Inventor: Yizhen Lin , Jan Mehner , Michael Naumann
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Charlene R. Jacobsen
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/574
Abstract:
An inertial sensor (110) includes a drive system (118) configured to oscillate a drive mass (114) within a plane (24) that is substantially parallel to a surface (50) of a substrate (28). The drive system (118) includes first and second drive units (120, 122) having fixed fingers (134, 136) interleaved with movable fingers (130, 132) of the drive mass (114). At least one of the drive units (120) is located on each side (126, 128) of the drive mass (114). Likewise, at least one of the drive units (122) is located on each side (126, 128) of the drive mass (114). The drive units (122) are driven in phase opposition to the drive units (120) so that a levitation force (104) generated by the drive units (122) compensates for, or at least partially suppresses, a levitation force (100) generated by the drive units (120).
Public/Granted literature
- US20140144231A1 INERTIAL SENSOR AND METHOD OF LEVITATION EFFECT COMPENSATION Public/Granted day:2014-05-29
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