Invention Grant
US09356169B2 Apparatus, system and method of back side illumination (BSI) complementary metal-oxide-semiconductor (CMOS) pixel array
有权
背面照明(BSI)互补金属氧化物半导体(CMOS)像素阵列的装置,系统和方法
- Patent Title: Apparatus, system and method of back side illumination (BSI) complementary metal-oxide-semiconductor (CMOS) pixel array
- Patent Title (中): 背面照明(BSI)互补金属氧化物半导体(CMOS)像素阵列的装置,系统和方法
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Application No.: US14791657Application Date: 2015-07-06
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Publication No.: US09356169B2Publication Date: 2016-05-31
- Inventor: Assaf Lahav , Amos Fenigstein
- Applicant: Tower Semiconductor Ltd.
- Applicant Address: IL Migdal Haemek
- Assignee: Tower Semiconductor Ltd.
- Current Assignee: Tower Semiconductor Ltd.
- Current Assignee Address: IL Migdal Haemek
- Agency: Shichrur & Co.
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/0352 ; H01L27/146

Abstract:
Some demonstrative embodiments include devices and/or methods of Back Side Illumination (BSI) Complementary Metal-Oxide-Semiconductor (CMOS) pixel array. For example, a BSI CMOS pixel array may include a plurality of pixels, a pixel of the plurality of pixels may include one or more Metal-Oxide-Semiconductor (MOS) transistors comprising one or more well regions, a well region of the one or more well regions comprising an N-Well (NW) region or a P-well (PW) region; a photodiode; an epitaxial (epi) layer comprising an absorption area and a collection area, the absorption area to absorb incoming photons and to generate electrons responsive to absorbed photons, and the collection area connecting the absorption area to the photodiode to provide the electrons from the absorption area to the photodiode; and a barrier layer separating the absorption area from the one or more well regions.
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