Invention Grant
US09358555B2 Threaded dispense nozzle and alignment method and device for photoresist and other fluid coaters
有权
螺纹分配喷嘴和光刻胶等流体涂布机的对准方法和装置
- Patent Title: Threaded dispense nozzle and alignment method and device for photoresist and other fluid coaters
- Patent Title (中): 螺纹分配喷嘴和光刻胶等流体涂布机的对准方法和装置
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Application No.: US14203095Application Date: 2014-03-10
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Publication No.: US09358555B2Publication Date: 2016-06-07
- Inventor: Ping Chou Lu
- Applicant: WaferTech, LLC
- Applicant Address: US WA Camas
- Assignee: WAFERTECH, LLC
- Current Assignee: WAFERTECH, LLC
- Current Assignee Address: US WA Camas
- Agency: Duane Morris LLP
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05B1/00 ; B05B15/08 ; B05B13/02 ; B05B15/06 ; B05D1/00 ; H01L21/67 ; B05B13/04

Abstract:
Provided is a fluid dispensing system with a dispense nozzle with a threaded outer surface and a fluid dispensing apparatus with a movable dispenser arm with an opening that includes threaded inner walls that receive the dispense nozzle therein. Also provided is a method for aligning a dispense head in a coating tool. Horizontal alignment is achieved by rotating the dispense nozzle until its tip is in contact with the chuck then laterally adjusting the dispenser arm position so that the tip is positioned over a center of the chuck. Vertical alignment is achieved by rotating the dispense nozzle until an indicia of the dispense nozzle is at the same vertical location as a designated physical feature of the dispenser arm.
Public/Granted literature
- US20140263481A1 THREADED DISPENSE NOZZLE AND ALIGNMENT METHOD AND DEVICE FOR PHOTORESIST AND OTHER FLUID COATERS Public/Granted day:2014-09-18
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