Invention Grant
- Patent Title: Infrared sensor of rear surface irradiation type
- Patent Title (中): 背面照射型红外线传感器
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Application No.: US14153588Application Date: 2014-01-13
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Publication No.: US09360373B2Publication Date: 2016-06-07
- Inventor: Hidetaka Noguchi
- Applicant: Hidetaka Noguchi
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: JP2013-049223 20130312
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J5/10 ; G01J5/12

Abstract:
A rear-surface-irradiation-type infrared sensor includes a substrate having a through hole passing through between an upper surface and a lower surface; an infrared absorption part on the substrate on a side of the upper surface separate from the substrate by the through hole; and a temperature sensor part detecting a change in a temperature of the infrared absorption part. The through hole includes a first through hole part having an opening on the upper surface and one or more second through hole parts having shapes different from the first through hole constituent part. The first through hole part and the second through hole part(s) communicate with each other. In a cross-sectional shape of the through hole on a plane perpendicular to the upper surface, an inside wall of the first through hole part is outside an inside wall of the of second through hole part(s).
Public/Granted literature
- US20140264022A1 INFRARED SENSOR OF REAR SURFACE IRRADIATION TYPE Public/Granted day:2014-09-18
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