Invention Grant
US09362082B2 Electron microscope and method of adjusting monochromator 有权
电子显微镜和调光单色仪的方法

  • Patent Title: Electron microscope and method of adjusting monochromator
  • Patent Title (中): 电子显微镜和调光单色仪的方法
  • Application No.: US14823141
    Application Date: 2015-08-11
  • Publication No.: US09362082B2
    Publication Date: 2016-06-07
  • Inventor: Masaki Mukai
  • Applicant: JEOL Ltd.
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2014-163643 20140811
  • Main IPC: H01J47/00
  • IPC: H01J47/00 H01J37/05 H01J37/21
Electron microscope and method of adjusting monochromator
Abstract:
An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy filter (22) for dispersing the beam (EB) according to energy and a slit plate (24) disposed on an energy dispersive plane. The slit plate (24) is provided with plural energy-selecting slits (25) which are different in width taken in a direction where the beam (EB) is dispersed. The microscope (100) further includes a lens system (30) on which the beam impinges after being monochromatized by the monochromator (20), a first measuring section (50) for measuring the intensity of the beam (EB) emitted from an electron beam source (10), a second measuring section (60) for measuring the intensity of the beam (EB) that has passed through an active one (25-L) of the energy-selecting slits (25), and a slit identifying portion (72) for identifying the active energy-selecting slit (25-L) from the plural energy-selecting slits (25) on the basis of the results of measurements made by the first and second measuring sections (50, 60).
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