Invention Grant
- Patent Title: Electron microscope and method of adjusting monochromator
- Patent Title (中): 电子显微镜和调光单色仪的方法
-
Application No.: US14823141Application Date: 2015-08-11
-
Publication No.: US09362082B2Publication Date: 2016-06-07
- Inventor: Masaki Mukai
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2014-163643 20140811
- Main IPC: H01J47/00
- IPC: H01J47/00 ; H01J37/05 ; H01J37/21

Abstract:
An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy filter (22) for dispersing the beam (EB) according to energy and a slit plate (24) disposed on an energy dispersive plane. The slit plate (24) is provided with plural energy-selecting slits (25) which are different in width taken in a direction where the beam (EB) is dispersed. The microscope (100) further includes a lens system (30) on which the beam impinges after being monochromatized by the monochromator (20), a first measuring section (50) for measuring the intensity of the beam (EB) emitted from an electron beam source (10), a second measuring section (60) for measuring the intensity of the beam (EB) that has passed through an active one (25-L) of the energy-selecting slits (25), and a slit identifying portion (72) for identifying the active energy-selecting slit (25-L) from the plural energy-selecting slits (25) on the basis of the results of measurements made by the first and second measuring sections (50, 60).
Public/Granted literature
- US20160079030A1 Electron Microscope and Method of Adjusting Monochromator Public/Granted day:2016-03-17
Information query