Invention Grant
US09366851B2 Dispersing immersion liquid for high resolution imaging and lithography
有权
分散浸没液体用于高分辨率成像和光刻
- Patent Title: Dispersing immersion liquid for high resolution imaging and lithography
- Patent Title (中): 分散浸没液体用于高分辨率成像和光刻
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Application No.: US13623239Application Date: 2012-09-20
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Publication No.: US09366851B2Publication Date: 2016-06-14
- Inventor: William M. Dougherty , Paul C. Goodwin , Steven A. Reese , David A. Stewart
- Applicant: GE HEALTHCARE BIO-SCIENCES CORP.
- Applicant Address: US NJ Piscataway
- Assignee: GE HEALTHCARE BIO-SCIENCES CORP.
- Current Assignee: GE HEALTHCARE BIO-SCIENCES CORP.
- Current Assignee Address: US NJ Piscataway
- Agency: Sutherland Asbill & Brennan LLP
- Main IPC: G02B21/33
- IPC: G02B21/33 ; G03F7/20

Abstract:
Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.
Public/Granted literature
- US20130016328A1 DISPERSING IMMERSION LIQUID FOR HIGH RESOLUTION IMAGING AND LITHOGRAPHY Public/Granted day:2013-01-17
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