公开(公告)号：US09507136B2

公开(公告)日：2016-11-29

申请号：US14356410

申请日：2012-11-14

Applicant: GE HEALTHCARE BIO-SCIENCES CORP.

Inventor： Jeremy R. Cooper ,  William M. Dougherty ,  Steven A. Reese

IPC: G02B21/06 ,  G02B17/02 ,  G02B21/00 ,  G01N21/64 ,  G02B21/16

CPC classification number: G02B21/06 ,  G01N21/645 ,  G02B17/023 ,  G02B21/002 ,  G02B21/16

Abstract: Illumination system for a microscope system capable of being mode-switchable between a first and a second illumination mode, comprising one source of light for providing a collimated beam of light, at least one selector mirror capable of being positioned in at least two positions to redirect the beam of light in two different beam paths, the first beam path being a direct exit beam path wherein the selector mirror redirects the beam of light along an exit beam path to provide a first illumination mode, the second beam path is a mirror loop path comprising two or more mirrors arranged to redirect the beam of light onto the selector mirror such that it is redirected by the selector mirror a second time along the exit beam path, and wherein mirror loop path comprises at least one optical element arranged to optically alter the beam of light to provide the second illumination mode. According to one embodiment, the first illumination mode is Total Internal Reflection (TIRF) and the second illumination mode is Photokinetics (PK) illumination.

Abstract translation: 一种能够在第一和第二照明模式之间进行模式切换的显微镜系统的照明系统，包括用于提供准直光束的一个光源，至少一个选择镜，能够位于至少两个位置以重定向 所述光束在两个不同的光束路径中，所述第一光束路径是直接出射光束路径，其中所述选择器镜沿着出射光束路径重定向所述光束以提供第一照明模式，所述第二光束路径是镜回路路径 包括两个或更多个反射镜，其布置成将光束重定向到选择器反射镜上，使得其沿着出射光束路径被选择镜反射重新定向，并且其中镜环路径包括至少一个光学元件，光学元件布置成光学地改变 光束提供第二种照明模式。 根据一个实施例，第一照明模式是全内反射（TIRF），第二照明模式是光动力学（PK）照明。

公开(公告)号：US09366851B2

公开(公告)日：2016-06-14

申请号：US13623239

申请日：2012-09-20

Applicant: GE HEALTHCARE BIO-SCIENCES CORP.

Inventor： William M. Dougherty ,  Paul C. Goodwin ,  Steven A. Reese ,  David A. Stewart

IPC: G02B21/33 ,  G03F7/20

CPC classification number: G02B21/33 ,  G02B21/002 ,  G02B21/02 ,  G03F7/70341

Abstract: Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.

Abstract translation: 描述了用于在高数值孔径光学显微镜和光刻中输送折射率匹配浸液的方法和装置。 浸没液体液滴的阵列通过浸没液体印刷装置输送到样品基片或样品基片盖。 浸没液体储存器通过精密泵向打印机提供浸液。 打印机将浸没液体以定义的体积和阵列图案的浸没液滴的阵列传送到基底或基底盖。 优化输送到衬底或衬底盖的阵列液滴的体积和图案，以在衬底或衬底盖和浸没物体之间保持足够的浸没液体，同时避免在浸液中形成气泡和积累过量的浸液 液体。

公开(公告)号：US10067330B2

公开(公告)日：2018-09-04

申请号：US15175667

申请日：2016-06-07

Applicant: GE Healthcare Bio-Sciences Corp.

Inventor： William M. Dougherty ,  Paul C. Goodwin ,  Steven A. Reese ,  David A. Stewart

IPC: G02B21/33 ,  G03F7/20 ,  G02B21/00 ,  G02B21/02

Abstract: Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.

公开(公告)号：US20140320958A1

公开(公告)日：2014-10-30

申请号：US14356410

申请日：2012-11-14

Applicant: GE HEALTHCARE BIO-SCIENCES CORP.

Inventor： Jeremy R. Cooper ,  William M. Dougherty ,  Steven A. Reese

IPC: G02B21/06

CPC classification number: G02B21/06 ,  G01N21/645 ,  G02B17/023 ,  G02B21/002 ,  G02B21/16

Abstract: Illumination system for a microscope system capable of being mode-switchable between a first and a second illumination mode, comprising one source of light for providing a collimated beam of light, at least one selector mirror capable of being positioned in at least two positions to redirect the beam of light in two different beam paths, the first beam path being a direct exit beam path wherein the selector mirror redirects the beam of light along an exit beam path to provide a first illumination mode, the second beam path is a mirror loop path comprising two or more mirrors arranged to redirect the beam of light onto the selector mirror such that it is redirected by the selector mirror a second time along the exit beam path, and wherein mirror loop path comprises at least one optical element arranged to optically alter the beam of light to provide the second illumination mode. According to one embodiment, the first illumination mode is Total Internal Reflection (TIRF) and the second illumination mode is Photokinetics (PK) illumination.

Abstract translation: 一种能够在第一和第二照明模式之间进行模式切换的显微镜系统的照明系统，包括用于提供准直光束的一个光源，至少一个选择镜，能够位于至少两个位置以重定向 所述光束在两个不同的光束路径中，所述第一光束路径是直接出射光束路径，其中所述选择器镜沿着出射光束路径重定向所述光束以提供第一照明模式，所述第二光束路径是镜回路路径 包括两个或更多个反射镜，其布置成将光束重定向到选择器反射镜上，使得其沿着出射光束路径被选择镜反射重新定向，并且其中镜环路径包括至少一个光学元件，光学元件布置成光学地改变 光束提供第二种照明模式。 根据一个实施例，第一照明模式是全内反射（TIRF），第二照明模式是光动力学（PK）照明。

公开(公告)号：US20160282597A1

公开(公告)日：2016-09-29

申请号：US15175667

申请日：2016-06-07

Applicant: GE Healthcare Bio-Sciences Corp.

Inventor： William M. Dougherty ,  Paul C. Goodwin ,  Steven A. Reese ,  David A. Stewart

IPC: G02B21/33 ,  G02B21/00 ,  G03F7/20 ,  G02B21/02

CPC classification number: G02B21/33 ,  G02B21/002 ,  G02B21/02 ,  G03F7/70341

Abstract: Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.

Abstract translation: 描述了用于在高数值孔径光学显微镜和光刻中输送折射率匹配浸液的方法和装置。 浸没液体液滴的阵列通过浸没液体印刷装置输送到样品基片或样品基片盖。 浸没液体储存器通过精密泵向打印机提供浸液。 打印机将浸没液体以定义的体积和阵列图案的浸没液滴的阵列传送到基底或基底盖。 优化输送到衬底或衬底盖的阵列液滴的体积和图案，以在衬底或衬底盖和浸没物体之间保持足够的浸没液体，同时避免在浸液中形成气泡和积累过量的浸液 液体。