Invention Grant
- Patent Title: Serpentine IR sensor
- Patent Title (中): 蛇形红外传感器
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Application No.: US13975577Application Date: 2013-08-26
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Publication No.: US09368658B2Publication Date: 2016-06-14
- Inventor: Fabian Purkl , Gary Yama , Ando Feyh , Gary O'Brien
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: H01L31/058
- IPC: H01L31/058 ; H01L31/0232 ; G01J5/04 ; G01J5/02 ; G01J5/06 ; G01J5/20 ; G01J5/08 ; H01L31/09
Abstract:
In one embodiment, a MEMS sensor includes a mirror and an absorber spaced apart from the mirror, the absorber including a plurality of spaced apart conductive legs defining a tortuous path across an area directly above the mirror.
Public/Granted literature
- US20140061845A1 SERPENTINE IR SENSOR Public/Granted day:2014-03-06
Information query
