Invention Grant
- Patent Title: Customizing a particle-beam writer using a convolution kernel
- Patent Title (中): 使用卷积内核自定义粒子束写入器
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Application No.: US14795547Application Date: 2015-07-09
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Publication No.: US09373482B2Publication Date: 2016-06-21
- Inventor: Elmar Platzgummer
- Applicant: IMS Nanofabrication AG
- Applicant Address: AT Vienna
- Assignee: IMS Nanofabrication AG
- Current Assignee: IMS Nanofabrication AG
- Current Assignee Address: AT Vienna
- Agency: KPPB LLP
- Priority: EP14176563 20140710; EP14199183 20141219
- Main IPC: H01J3/14
- IPC: H01J3/14 ; H01J37/317 ; H01J37/302 ; G06F17/50 ; H01J37/09 ; H01J37/04

Abstract:
An exposure pattern is computed which is used for exposing a desired pattern on a target in a charged-particle multi-beam processing apparatus so as to match a reference writing tool, possible of different type: The desired pattern is provided as a graphical representation suitable for the reference tool, such as a raster graphics, on the image area on the target. A convolution kernel is used which describes a mapping from an element of the graphical representation to a group of pixels which is centered around a nominal position of said element. A nominal exposure pattern is calculated by convolution of the graphical representation with the convolution kernel, said nominal exposure pattern being suitable to create a nominal dose distribution on the target when exposed with the processing apparatus.
Public/Granted literature
- US20160012170A1 Customizing a Particle-Beam Writer Using a Convolution Kernel Public/Granted day:2016-01-14
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