Invention Grant
- Patent Title: Methods of forming non-volatile memory devices including vertical NAND strings
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Application No.: US14603827Application Date: 2015-01-23
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Publication No.: US09373633B2Publication Date: 2016-06-21
- Inventor: Beom-jun Jin , Byung-seo Kim , Sung-Dong Kim
- Applicant: Beom-jun Jin , Byung-seo Kim , Sung-Dong Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, P.A.
- Priority: KR10-2008-0054710 20080611
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L27/115 ; H01L21/768 ; H01L21/28 ; H01L21/308

Abstract:
A NAND based non-volatile memory device can include a plurality of memory cells vertically arranged as a NAND string and a plurality of word line plates each electrically connected to a respective gate of the memory cells in the NAND string. A plurality of word line contacts can each be electrically connected to a respective word line plate, where the plurality of word line contacts are aligned to a bit line direction in the device.
Public/Granted literature
- US20150140813A1 Methods of Forming Non-Volatile Memory Devices Including Vertical NAND Strings Public/Granted day:2015-05-21
Information query
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