Invention Grant
- Patent Title: Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof
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Application No.: US14806481Application Date: 2015-07-22
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Publication No.: US09376310B2Publication Date: 2016-06-28
- Inventor: Philip H. Bowles , Stephen R. Hooper
- Applicant: FREESCALE SEMICONDUCTOR INC.
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H01L25/00 ; H01L25/16 ; B81B7/02

Abstract:
Methods for fabricating multi-sensor microelectronic packages and multi-sensor microelectronic packages are provided. In one embodiment, the method includes positioning a magnetometer wafer comprised of an array of non-singulated magnetometer die over an accelerometer wafer comprised of an array of non-singulated accelerometer die. The magnetometer wafer is bonded to the accelerometer wafer to produce a bonded wafer stack. The bonded wafer stack is then singulated to yield a plurality of multi-sensor microelectronic packages each including a singulated magnetometer die bonded to a singulated accelerometer die.
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