Invention Grant
- Patent Title: Photoreflectance device
- Patent Title (中): 光反射装置
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Application No.: US14651414Application Date: 2013-12-09
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Publication No.: US09377300B2Publication Date: 2016-06-28
- Inventor: Antonin Moreau , Véronica Bermudez , Ludovic Escoubas , Jean-Jacques Simon
- Applicant: NEXCIS , UNIVERSITE D'AIX MARSEILLE
- Applicant Address: FR Rousset FR Marseilles
- Assignee: NEXCIS,UNIVERSITE D'AIX-MARSEILLE
- Current Assignee: NEXCIS,UNIVERSITE D'AIX-MARSEILLE
- Current Assignee Address: FR Rousset FR Marseilles
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1261870 20121211
- International Application: PCT/EP2013/075954 WO 20131209
- International Announcement: WO2014/090748 WO 20140619
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01N21/17

Abstract:
A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface.
Public/Granted literature
- US20150338212A1 PHOTOREFLECTANCE DEVICE Public/Granted day:2015-11-26
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