Invention Grant
- Patent Title: Optical enhancing durable anti-reflective coating
- Patent Title (中): 光学增强耐用抗反射涂层
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Application No.: US14491259Application Date: 2014-09-19
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Publication No.: US09382449B2Publication Date: 2016-07-05
- Inventor: Sina Maghsoodi , Aravamuthan Varadarajan , Meisam Movassat
- Applicant: Enki Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Enki Technology, Inc.
- Current Assignee: Enki Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: GTC Law Group PC & Affiliates
- Main IPC: C09D183/00
- IPC: C09D183/00 ; C09D183/04 ; C03C17/30 ; C08J9/00 ; C08J9/14 ; G02B1/111 ; C08K3/04 ; C08K3/36 ; C08K5/19 ; C08K7/26 ; G02B1/14 ; G02B1/18

Abstract:
Disclosed herein are polysilsesquioxane based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In embodiments, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in the polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, Si—OH condensation catalyst and/or nanofillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes including flow coating and roll coating, and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.
Public/Granted literature
- US20160083620A1 OPTICAL ENHANCING DURABLE ANTI-REFLECTIVE COATING Public/Granted day:2016-03-24
Information query
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