Invention Grant
- Patent Title: Method of measuring vapor flux density
- Patent Title (中): 测量蒸气通量密度的方法
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Application No.: US14140687Application Date: 2013-12-26
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Publication No.: US09383316B2Publication Date: 2016-07-05
- Inventor: Markus E. Beck , Ulrich A. Bonne , Raffi Garabedian , Erel Milshtein , Ming Lun Yu
- Applicant: First Solar, Inc.
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US OH Perrysburg
- Agency: Blank Rome LLP
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C16/52 ; G01N21/59 ; G01N21/31 ; G01N21/39
Abstract:
A method of measuring vapor flux density including directing a light beam through a vapor flux to a pixel array sensor and using the pixel array sensor to measure attenuation of the light beam.
Public/Granted literature
- US20140104616A1 FLUX MONITOR Public/Granted day:2014-04-17
Information query
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