Invention Grant
- Patent Title: Plasma generator and plasma generating device
- Patent Title (中): 等离子发生器和等离子体发生装置
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Application No.: US14125799Application Date: 2012-06-15
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Publication No.: US09386678B2Publication Date: 2016-07-05
- Inventor: Takashige Yagi , Hiroshi Makino , Tetsuya Tojo , Takahito Hirata
- Applicant: Takashige Yagi , Hiroshi Makino , Tetsuya Tojo , Takahito Hirata
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: JP2011-134090 20110616
- International Application: PCT/JP2012/065365 WO 20120615
- International Announcement: WO2012/173229 WO 20121220
- Main IPC: H01J17/26
- IPC: H01J17/26 ; H01J61/28 ; H05H1/24 ; H01T23/00

Abstract:
The plasma generator has the dielectric having the inner circumferential surface, and a pair of electrodes which are arranged separated from each other in the direction along the inner circumferential surface and are isolated from each other by the dielectric and which are capable of generating plasma on the inner circumferential surface by application of voltage. In the inner circumferential surface, at the positions between the pair of electrodes in a plan view, recessed portions causing electric field concentration are formed.
Public/Granted literature
- US20140117834A1 PLASMA GENERATOR AND PLASMA GENERATING DEVICE Public/Granted day:2014-05-01
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