Invention Grant
US09389350B2 Optical module, electronic device, food analyzer, spectroscopic camera, driving method of wavelength variable interference filter
有权
光模块,电子设备,食品分析仪,光谱相机,波长可变干涉滤波器的驱动方法
- Patent Title: Optical module, electronic device, food analyzer, spectroscopic camera, driving method of wavelength variable interference filter
- Patent Title (中): 光模块,电子设备,食品分析仪,光谱相机,波长可变干涉滤波器的驱动方法
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Application No.: US13892856Application Date: 2013-05-13
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Publication No.: US09389350B2Publication Date: 2016-07-12
- Inventor: Nozomu Hirokubo
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-112207 20120516
- Main IPC: G01J3/26
- IPC: G01J3/26 ; G02B5/28 ; G01J3/45 ; G02B26/00

Abstract:
A optical module includes, a wavelength variable interference filter which include reflection films opposite to each other and an electrostatic actuator portion including a first electrostatic actuator and a second electrostatic actuator and changing a gap between the reflection films, and a voltage control portion which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion which applies bias voltage to the first electrostatic actuator, a gap detector, and a feedback control portion which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator.
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