Invention Grant
US09389350B2 Optical module, electronic device, food analyzer, spectroscopic camera, driving method of wavelength variable interference filter 有权
光模块,电子设备,食品分析仪,光谱相机,波长可变干涉滤波器的驱动方法

Optical module, electronic device, food analyzer, spectroscopic camera, driving method of wavelength variable interference filter
Abstract:
A optical module includes, a wavelength variable interference filter which include reflection films opposite to each other and an electrostatic actuator portion including a first electrostatic actuator and a second electrostatic actuator and changing a gap between the reflection films, and a voltage control portion which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion which applies bias voltage to the first electrostatic actuator, a gap detector, and a feedback control portion which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator.
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