Invention Grant
US09390882B2 Apparatus having a magnetic lens configured to diverge an electron beam
有权
具有配置为分散电子束的磁性透镜的装置
- Patent Title: Apparatus having a magnetic lens configured to diverge an electron beam
- Patent Title (中): 具有配置为分散电子束的磁性透镜的装置
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Application No.: US14171357Application Date: 2014-02-03
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Publication No.: US09390882B2Publication Date: 2016-07-12
- Inventor: Shixin Wang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01J47/00
- IPC: H01J47/00 ; H01J37/14 ; H01J37/09 ; H01J37/153 ; H01J37/28 ; H01J29/64

Abstract:
Apparatus having a magnetic lens configured to diverge an electron beam are useful in three-dimensional imaging using an electron microscope. The magnetic lens includes a body member having a core and defining a gap, and a winding surrounding a portion of the core. The body member and winding are configured such that an electrical current through the winding produces a magnetic field proximate to the gap.
Public/Granted literature
- US20140145089A1 APPARATUS HAVING A MAGNETIC LENS CONFIGURED TO DIVERGE AN ELECTRON BEAM Public/Granted day:2014-05-29
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