Invention Grant
- Patent Title: Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars
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Application No.: US14527039Application Date: 2014-10-29
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Publication No.: US09390936B2Publication Date: 2016-07-12
- Inventor: Michael D. Henry , Andrew P. Homyk , Axel Scherer , Thomas A. Tombrello , Sameer Walavalkar
- Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY , Stephanie Tombrello
- Agency: Steinfl & Bruno, LLP
- Main IPC: G01N1/18
- IPC: G01N1/18 ; H01L21/308 ; B81C1/00 ; H01L21/3065 ; G01N1/40
Abstract:
Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.
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