Invention Grant
US09390980B1 III-V compound and germanium compound nanowire suspension with germanium-containing release layer
有权
具有含锗释放层的III-V化合物和锗化合物纳米线悬浮液
- Patent Title: III-V compound and germanium compound nanowire suspension with germanium-containing release layer
- Patent Title (中): 具有含锗释放层的III-V化合物和锗化合物纳米线悬浮液
-
Application No.: US14666520Application Date: 2015-03-24
-
Publication No.: US09390980B1Publication Date: 2016-07-12
- Inventor: Guy M. Cohen , Isaac Lauer , Alexander Reznicek , Jeffrey W. Sleight
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent David B. Woycechowsky
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L51/40 ; H01L29/06 ; H01L21/306 ; H01L21/311 ; H01L29/66 ; H01L29/161 ; H01L29/201 ; H01L27/092 ; H01L21/02

Abstract:
A device that includes: a substrate layer; a first set of source/drain component(s) defining an nFET (n-type field-effect transistor) region; a second set of source/drain component(s) defining a pFET (p-type field-effect transistor) region; a first suspended nanowire, at least partially suspended over the substrate layer in the nFET region and made from III-V material; and a second suspended nanowire, at least partially suspended over the substrate layer in the pFET region and made from Germanium-containing material. In some embodiments, the first suspended nanowire and the second suspended nanowire are fabricated by adding appropriate nanowire layers on top of a Germanium-containing release layer, and then removing the Germanium-containing release layers so that the nanowires are suspended.
Information query
IPC分类: