Invention Grant
US09397241B2 Metal-insulator-semiconductor devices based on surface plasmon polaritons
有权
基于表面等离子体激元的金属绝缘体半导体器件
- Patent Title: Metal-insulator-semiconductor devices based on surface plasmon polaritons
- Patent Title (中): 基于表面等离子体激元的金属绝缘体半导体器件
-
Application No.: US14563780Application Date: 2014-12-08
-
Publication No.: US09397241B2Publication Date: 2016-07-19
- Inventor: Pierre Simon Joseph Berini , Chengkun Chen
- Applicant: University of Ottawa
- Applicant Address: CA Ottawa
- Assignee: University of Ottawa
- Current Assignee: University of Ottawa
- Current Assignee Address: CA Ottawa
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: G02B6/34
- IPC: G02B6/34 ; H01L31/0232 ; H01L31/18 ; H01L31/0236 ; G02B6/26 ; G02F1/025 ; G02F1/17 ; G02B6/122 ; G02B6/124 ; G02F1/015

Abstract:
Apparatus and techniques are presented such as can be used for electro-optic modulation and detection or other applications. For example, an optical metal grating is disposed on a thin metal film to couple light from broadside to the metal film as surface plasmon-polariton waves; below the metal film is located a thin insulating layer and a doped semiconductor region forming a metal-insulator-semiconductor structure. The device can be configured to operate as a reflection or transmission modulator, or as a photodetector, for example. Modulating the voltage applied to the metal-insulator-semiconductor structure modulates the carrier concentration in the semiconductor near the insulating layer, which modulates the refractive index of the semiconductor in this region, thus modulating the coupling efficiency to the surface plasmon-polaritons, thus modulating the reflectance and transmittance of the device. Modulated incident light produces a modulated photocurrent under bias which may be detected using electronics.
Public/Granted literature
- US20150162462A1 METAL-INSULATOR-SEMICONDUCTOR DEVICES BASED ON SURFACE PLASMON POLARITONS Public/Granted day:2015-06-11
Information query