Invention Grant
- Patent Title: Imprint apparatus
- Patent Title (中): 印刷装置
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Application No.: US13603575Application Date: 2012-09-05
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Publication No.: US09400426B2Publication Date: 2016-07-26
- Inventor: Zenichi Hamaya , Noriyasu Hasegawa , Setsuo Yoshida , Yoshihiro Shiode
- Applicant: Zenichi Hamaya , Noriyasu Hasegawa , Setsuo Yoshida , Yoshihiro Shiode
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-194583 20110907; JP2012-111419 20120515
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00 ; B82Y40/00 ; B29C59/02

Abstract:
An imprint apparatus molds an uncured resin on a substrate and cures the resin to form a pattern of the cured resin on the substrate. The apparatus includes a mold holding unit that holds the mold, a substrate holding unit that holds the substrate, a deforming unit that deforms the mold held by the mold holding unit into a convex shape toward the substrate, a driving unit that changes an attitude of the mold or the substrate during a releasing operation in which the mold deformed into the convex shape is released from the resin to thereby make the position of a contact region at which the mold is brought into contact with the resin movable, a measuring unit that acquires image information indicating a state of the contact region, and a control unit configured to control the operation of the driving unit based on the image information.
Public/Granted literature
- US20130056905A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME Public/Granted day:2013-03-07
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