Invention Grant
- Patent Title: Self-aligned capillarity-assisted microfabrication
- Patent Title (中): 自对准毛细管辅助微细加工
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Application No.: US14538367Application Date: 2014-11-11
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Publication No.: US09401306B2Publication Date: 2016-07-26
- Inventor: Ankit Mahajan , Carl Daniel Frisbie , Lorraine F. Francis
- Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA
- Applicant Address: US MN Minneapolis
- Assignee: REGENTS OF THE UNIVERSITY OF MINNESOTA
- Current Assignee: REGENTS OF THE UNIVERSITY OF MINNESOTA
- Current Assignee Address: US MN Minneapolis
- Agency: Mueting, Raasch & Gebhardt, P.A.
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/768 ; H01L29/06 ; H01L21/683 ; H01L31/0392 ; H01L27/12 ; H01L29/786 ; H01L21/48
Abstract:
A manufacturing process, which we term Self-Aligned Capillarity-Assisted Lithography for manufacturing devices having nano-scale or micro-scale features, such as flexible electronic circuits, is described.
Public/Granted literature
- US20150130069A1 Self-Aligned Capillarity-Assisted Microfabrication Public/Granted day:2015-05-14
Information query
IPC分类:
