Invention Grant
US09401422B2 Trench DMOS device with reduced gate resistance and manufacturing method thereof
有权
具有降低的栅极电阻的沟槽DMOS器件及其制造方法
- Patent Title: Trench DMOS device with reduced gate resistance and manufacturing method thereof
- Patent Title (中): 具有降低的栅极电阻的沟槽DMOS器件及其制造方法
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Application No.: US14651706Application Date: 2013-12-31
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Publication No.: US09401422B2Publication Date: 2016-07-26
- Inventor: Zheng Bian
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN Jiangsu
- Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
- Current Assignee Address: CN Jiangsu
- Agency: Polsinelli PC
- Priority: CN201310014452 20130115
- International Application: PCT/CN2013/091154 WO 20131231
- International Announcement: WO2014/110977 WO 20140724
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/265 ; H01L29/40 ; H01L29/49 ; H01L29/66 ; H01L29/417 ; H01L29/423 ; H01L29/06 ; H01L29/10

Abstract:
A trench-type DMOS device includes a substrate as a public drain region, an active region and a voltage-dividing ring formed on the substrate, and a first dielectric layer formed on the substrate. Multiple trenches are located on the first dielectric layer, and the trenches extend from the surface of the first dielectric layer into the interior of the substrate. The trenches comprise at least one first trench distributed in the active region and a second trench outside the active region. A gate oxide layer is formed in the trench and polycrystalline silicon is filled to form a gate. The active region further comprises a source electrode region and a P-type heavily doped region under the source electrode region. A second dielectric layer covers the first dielectric layer and the multiple trenches. A metal layer covers the second dielectric layer to form a first electrode region and a second electrode region.
Public/Granted literature
- US20150333176A1 TRENCH DMOS DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-11-19
Information query
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