Invention Grant
- Patent Title: Photonic devices on planar and curved substrates and methods for fabrication thereof
- Patent Title (中): 平面和弯曲基板上的光子器件及其制造方法
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Application No.: US14362037Application Date: 2012-11-29
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Publication No.: US09403186B2Publication Date: 2016-08-02
- Inventor: Michael H. Bartl , Moussa Barhoum , David Riassetto
- Applicant: University of Utah Research Foundation
- Applicant Address: US UT Salt Lake City
- Assignee: University of Utah Research Foundation
- Current Assignee: University of Utah Research Foundation
- Current Assignee Address: US UT Salt Lake City
- Agency: Workman Nydegger
- International Application: PCT/US2012/067131 WO 20121129
- International Announcement: WO2013/130140 WO 20130906
- Main IPC: B05D3/02
- IPC: B05D3/02 ; C23C18/12 ; G02B5/28

Abstract:
A versatile and rapid sol-gel technique for the fabrication of high quality one-dimensional photonic bandgap materials. For example, silica/titania multi-layer materials may be fabricated by a sol-gel chemistry route combined with dip-coating onto planar or curved substrate. A shock-cooling step immediately following the thin film heat-treatment process is introduced. This step was found important in the prevention of film crack formation—especially in silica/titania alternating stack materials with a high number of layers. The versatility of this sol-gel method is demonstrated by the fabrication of various Bragg stack-type materials with fine-tuned optical properties by tailoring the number and sequence of alternating layers, the film thickness and the effective refractive index of the deposited thin films. Measured optical properties show good agreement with theoretical simulations confirming the high quality of these sol-gel fabricated optical materials.
Public/Granted literature
- US20140287147A1 PHOTONIC DEVICES ON PLANAR AND CURVED SUBSTRATES AND METHODS FOR FABRICATION THEREOF Public/Granted day:2014-09-25
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