Invention Grant
US09406496B2 Method and system for improving characteristic peak signals in analytical electron microscopy
有权
用于改善分析电子显微镜中特征峰信号的方法和系统
- Patent Title: Method and system for improving characteristic peak signals in analytical electron microscopy
- Patent Title (中): 用于改善分析电子显微镜中特征峰信号的方法和系统
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Application No.: US13681245Application Date: 2012-11-19
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Publication No.: US09406496B2Publication Date: 2016-08-02
- Inventor: Sonia Estrade Albiol , Joaquin Portillo Serra , Francisca Peiró Martinez , José Manuel Rebled Corsellas , Lluís Yedra Cardona , Stavros Nicolopoulos , Steven Kim , Jon Karl Weiss
- Applicant: Universitat de Barcelona , Nanomegas SPRL , AppFive LLC
- Applicant Address: ES Barcelona ES Molenbeek-Saint-Jean US AZ Tempe
- Assignee: UNIVERSITAT DE BARCELONA,NANOMEGAS SPRL,APPFIVE LLC
- Current Assignee: UNIVERSITAT DE BARCELONA,NANOMEGAS SPRL,APPFIVE LLC
- Current Assignee Address: ES Barcelona ES Molenbeek-Saint-Jean US AZ Tempe
- Agency: Blue Filament Law PLLC
- Agent Avery N. Goldstein
- Priority: EP12160112 20120319
- Main IPC: G01N23/225
- IPC: G01N23/225 ; H01J49/44 ; H01J37/28
Abstract:
A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.
Public/Granted literature
- US20130240728A1 METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANALYTICAL ELECTRON MICROSCOPY Public/Granted day:2013-09-19
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