Invention Grant
- Patent Title: Integrated passive devices for finFET technologies
- Patent Title (中): 用于finFET技术的集成无源器件
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Application No.: US14686981Application Date: 2015-04-15
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Publication No.: US09406665B2Publication Date: 2016-08-02
- Inventor: Thomas N. Adam , Kangguo Cheng , Balasubramanian Pranatharthi Haran , Shom Ponoth , Theodorus E. Standaert , Tenko Yamashita
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts, Mlotkowski, Safran & Cole PC
- Agent Steven Myers; Andrew M. Calderon
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L27/02 ; H01L21/84 ; H01L27/12

Abstract:
Integrated passive devices for silicon on insulator (SOI) FinFET technologies and methods of manufacture are disclosed. The method includes forming a passive device on a substrate on insulator material. The method further includes removing a portion of the insulator material to expose an underside surface of the substrate on insulator material. The method further includes forming material on the underside surface of the substrate on insulator material, thereby locally thickening the substrate on insulator material under the passive device.
Public/Granted literature
- US20150221631A1 INTEGRATED PASSIVE DEVICES FOR FINFET TECHNOLOGIES Public/Granted day:2015-08-06
Information query
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