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US09406970B2 Method for forming a lithium-ion type battery 有权
锂离子型电池的形成方法

Method for forming a lithium-ion type battery
Abstract:
A method for manufacturing a lithium-ion type battery including the steps of forming in a substrate a recess having lateral walls having a re-entrant profile; depositing, by successive non-conformal physical vapor depositions, a stack of the different layers forming a lithium-ion battery, this stack having a thickness smaller than the depth of the recess; depositing on the structure a filling layer filling the space remaining in the recess; and planarizing the structure to expose the upper surface of the stack.
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