Invention Grant
- Patent Title: Modular gas injection device
- Patent Title (中): 模块式注气装置
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Application No.: US13638094Application Date: 2011-03-25
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Publication No.: US09410248B2Publication Date: 2016-08-09
- Inventor: Jacques Constant Stefan Kools
- Applicant: Jacques Constant Stefan Kools
- Applicant Address: FR Simiane Collongue
- Assignee: KOOLERHEADZ
- Current Assignee: KOOLERHEADZ
- Current Assignee Address: FR Simiane Collongue
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Priority: FR1001255 20100329; FR1001257 20100329
- International Application: PCT/IB2011/051274 WO 20110325
- International Announcement: WO2011/121508 WO 20111006
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/18 ; C23C16/44 ; C30B25/14 ; C23C16/448 ; B05D1/00 ; F15D1/08

Abstract:
Embodiments of the device relate to a modular injector (100) for injecting a gas into a processing chamber (42), comprising at least two adjacent injectors (1), each injector comprising an inlet for receiving a gas wave or a gas flow, a flow shaping section (2) having left and right sidewalls that diverge according to a divergence angle relative to a propagation axis of the gas, for expanding the gas in a direction perpendicular to the propagation axis, and an outlet for expelling the gas. The modular injector forms an equivalent large injector having an equivalent large outlet which includes the outlets of the adjacent injectors and expands the gas over the equivalent large outlet.
Public/Granted literature
- US20130014698A1 MODULAR GAS INJECTION DEVICE Public/Granted day:2013-01-17
Information query
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