Invention Grant
- Patent Title: Apparatus and method for inspecting pins on a probe card
- Patent Title (中): 用于检查探针卡上的针的装置和方法
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Application No.: US14323784Application Date: 2014-07-03
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Publication No.: US09417308B2Publication Date: 2016-08-16
- Inventor: Oscar Beijert
- Applicant: Stichting Continuiteit Beijert Engineering
- Applicant Address: NL Hattem
- Assignee: Stichting Continuiteit Beijert Engineering
- Current Assignee: Stichting Continuiteit Beijert Engineering
- Current Assignee Address: NL Hattem
- Agency: Patterson & Sheridan, LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01R35/00 ; G01N21/95 ; G01B11/02

Abstract:
Embodiments described herein generally relate to methods and apparatuses for ensuring the integrity of probe card assemblies and verifying that probe cards are ready for testing. In one embodiment, an apparatus includes a stage that allows stable and precise movement of a sensor. The stage includes a first support, a second support, and a sensor carrier. A plurality of lifting devices is coupled to the second support and the sensor carrier, providing a more stable and precise movement for the sensor carrier. Methods for identifying objects other than the probes disposed on a surface of a probe card and to determine whether the probe card is ready for use are disclosed.
Public/Granted literature
- US20150010205A1 APPARATUS AND METHOD FOR INSPECTING PINS ON A PROBE CARD Public/Granted day:2015-01-08
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