公开(公告)号：US09417308B2

公开(公告)日：2016-08-16

申请号：US14323784

申请日：2014-07-03

Applicant: Stichting Continuiteit Beijert Engineering

Inventor： Oscar Beijert

IPC: G06K9/00 ,  G01R35/00 ,  G01N21/95 ,  G01B11/02

CPC classification number: G01R35/00 ,  G01B11/022 ,  G01N21/95 ,  G01N2201/10

Abstract: Embodiments described herein generally relate to methods and apparatuses for ensuring the integrity of probe card assemblies and verifying that probe cards are ready for testing. In one embodiment, an apparatus includes a stage that allows stable and precise movement of a sensor. The stage includes a first support, a second support, and a sensor carrier. A plurality of lifting devices is coupled to the second support and the sensor carrier, providing a more stable and precise movement for the sensor carrier. Methods for identifying objects other than the probes disposed on a surface of a probe card and to determine whether the probe card is ready for use are disclosed.

Abstract translation: 本文描述的实施例通常涉及用于确保探针卡组件的完整性并验证探针卡是否准备好进行测试的方法和装置。 在一个实施例中，一种装置包括允许传感器稳定且精确地移动的平台。 舞台包括第一支撑件，第二支撑件和传感器支架。 多个提升装置联接到第二支撑件和传感器载体，为传感器载体提供更稳定和精确的移动。 公开了用于识别设置在探针卡的表面上的探针以外的对象以及确定探针卡是否可以使用的方法。