Invention Grant
- Patent Title: Nano- and micro-electromechanical resonators
- Patent Title (中): 纳米和微机电谐振器
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Application No.: US14784876Application Date: 2014-04-22
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Publication No.: US09425765B2Publication Date: 2016-08-23
- Inventor: Matteo Rinaldi , Zhenyun Qian , Yu Hui
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Postermak Blankstein & Lund LLP
- International Application: PCT/US2014/035015 WO 20140422
- International Announcement: WO2015/012914 WO 20150129
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13 ; H03H9/15 ; G01J5/44 ; G01J5/04 ; H03H9/17 ; H01L41/18 ; H03H3/02 ; H03H9/24

Abstract:
A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.
Public/Granted literature
- US20160065169A1 NANO- AND MICRO-ELECTROMECHANICAL RESONATORS Public/Granted day:2016-03-03
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