Invention Grant
- Patent Title: Plasma cell with floating flange
- Patent Title (中): 带浮动法兰的等离子体电池
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Application No.: US14567546Application Date: 2014-12-11
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Publication No.: US09433070B2Publication Date: 2016-08-30
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Amir Torkaman
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01J61/30 ; H01J61/52 ; H01J65/04

Abstract:
A plasma cell for forming light-sustained plasma includes a transmission element configured to contain a volume of gas, a first terminal flange disposed at or near an opening of the transmission element, a second terminal flange disposed at or near another opening of the transmission element, a floating flange disposed between the first or second terminal flange and the transmission element. The floating flange is movable to compensate for thermal expansion of the transmission element. Further, the floating flange is configured to enclose the internal volume of the transmission element to contain a volume of gas within the transmission element. The transmission element is configured to receive illumination from an illumination source in order to generate plasma within the volume of gas. The transmission element is transparent to a portion of the illumination from the illumination source and a portion of broadband radiation emitted by the plasma.
Public/Granted literature
- US20150201483A1 Plasma Cell with Floating Flange Public/Granted day:2015-07-16
Information query
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