Invention Grant
- Patent Title: Method of reconstructing electrical probes
- Patent Title (中): 电探头重建方法
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Application No.: US13900857Application Date: 2013-05-23
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Publication No.: US09435828B2Publication Date: 2016-09-06
- Inventor: David R. Goulet , Walter V. Lepuschenko
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: G01R3/00
- IPC: G01R3/00 ; G01R1/067 ; G01R35/00
Abstract:
A probe, comprising: a shank region having a top surface integrally connected to a bottom surface of a conical region; a pyramidal tip region having a base surface integrally connected to a top surface of the conical region; and wherein the base surface of the pyramidal tip region is contained within a perimeter of the top surface of the conical region. Also a method of fabricating the probe and a method of probing devices under test.
Public/Granted literature
- US20140347038A1 Method of Reconstructing Electrical Probes Public/Granted day:2014-11-27
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