公开(公告)号：US09435828B2

公开(公告)日：2016-09-06

申请号：US13900857

申请日：2013-05-23

Applicant: GLOBALFOUNDRIES INC.

Inventor： David R. Goulet ,  Walter V. Lepuschenko

IPC: G01R3/00 ,  G01R1/067 ,  G01R35/00

CPC classification number: G01R1/06738 ,  G01R3/00 ,  G01R35/00 ,  H01J2237/208 ,  H01J2237/3174

Abstract: A probe, comprising: a shank region having a top surface integrally connected to a bottom surface of a conical region; a pyramidal tip region having a base surface integrally connected to a top surface of the conical region; and wherein the base surface of the pyramidal tip region is contained within a perimeter of the top surface of the conical region. Also a method of fabricating the probe and a method of probing devices under test.

Abstract translation: 一种探针，包括：柄区，其具有与圆锥形区域的底表面一体连接的顶表面; 金字塔形尖端区域，其具有与所述锥形区域的顶表面一体连接的基面; 并且其中金字塔形尖端区域的基面包含在锥形区域的顶表面的周边内。 还有一种制造探针的方法和一种探测被测器件的方法。