Invention Grant
US09448115B2 Apparatus and methods for extracting topographic information from inspected objects 有权
从检查对象提取地形信息的装置和方法

Apparatus and methods for extracting topographic information from inspected objects
Abstract:
Systems and methods for extracting topographic information from inspected objects to identify defects in the inspected objects. A part to be inspected is illuminated with at least two different colors emitted from an illuminator providing a gradient of light consisting of the at least two different colors. A single color image of the illuminated part to be inspected is acquired, providing a color-coded topographic mapping of the part to be inspected due, at least in part, to the gradient of light. Topographic monochrome views of the part to be inspected may be generated from the single color image. Each view of the topographic monochrome views may enhance a different type of feature or defect present in the part to be inspected which can be analyzed and detected.
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