Invention Grant
- Patent Title: Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
- Patent Title (中): 可变波长干涉滤波器,滤光器件,光模块和电子设备
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Application No.: US13602885Application Date: 2012-09-04
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Publication No.: US09448176B2Publication Date: 2016-09-20
- Inventor: Yasushi Matsuno , Akira Sano
- Applicant: Yasushi Matsuno , Akira Sano
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-214876 20110929
- Main IPC: G01J3/50
- IPC: G01J3/50 ; G01J3/26 ; G02B26/00 ; G01N21/65

Abstract:
A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv≧20×kair is satisfied.
Public/Granted literature
- US20130083398A1 VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS Public/Granted day:2013-04-04
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