Invention Grant
- Patent Title: Thin film transistor and display array substrate using same
- Patent Title (中): 薄膜晶体管和显示阵列基板使用相同
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Application No.: US14467444Application Date: 2014-08-25
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Publication No.: US09478669B2Publication Date: 2016-10-25
- Inventor: I-Wei Wu , I-Min Lu , Wei-Chih Chang , Hui-Chu Lin , Yi-Chun Kao , Kuo-Lung Fang
- Applicant: Ye Xin Technology Consulting Co., Ltd.
- Applicant Address: TW New Taipei
- Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee Address: TW New Taipei
- Agent Zhigang Ma
- Priority: TW102130379A 20130823
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L29/66 ; H01L21/3105 ; H01L21/311

Abstract:
A thin film transistor includes a gate electrode, a gate insulating layer, a channel layer, an etching stop layer, two contact holes, a source, and a drain. The gate insulating layer covers the gate electrode. The channel layer is arranged on the gate insulating layer corresponding to the gate electrode. The etching stop layer covers the channel layer and includes an organic stop layer and a hard mask layer, the hard mask layer is located on a surface of the organic stop layer opposite to the channel layer to enhance a hardness of the organic stop layer. The two contact holes pass through the etching stop layer. The source connects to the channel via one contact hole, and the drain connects to the channel via the other contact hole.
Public/Granted literature
- US20150053974A1 THIN FILM TRANSISTOR AND DISPLAY ARRAY SUBSTRATE USING SAME Public/Granted day:2015-02-26
Information query
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