Invention Grant
- Patent Title: Adjustable mass resolving aperture
-
Application No.: US15136503Application Date: 2016-04-22
-
Publication No.: US09496120B2Publication Date: 2016-11-15
- Inventor: Glenn E. Lane
- Applicant: Glenn Lane Family Limited Liability Limited Partnership
- Applicant Address: US FL Summerfield
- Assignee: Glenn Lane Family Limited Liability Limited Partnership
- Current Assignee: Glenn Lane Family Limited Liability Limited Partnership
- Current Assignee Address: US FL Summerfield
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Main IPC: H01J37/30
- IPC: H01J37/30 ; C23C14/48 ; C23C14/54 ; H01J37/317 ; H01J49/06 ; H01L21/265

Abstract:
Embodiments of the invention relate to a mass resolving aperture that may be used in an ion implantation system that selectively exclude ion species based on charge to mass ratio (and/or mass to charge ratio) that are not desired for implantation, in an ion beam assembly. Embodiments of the invention relate to a mass resolving aperture that is segmented, adjustable, and/or presents a curved surface to the oncoming ion species that will strike the aperture. Embodiments of the invention also relate to the filtering of a flow of charged particles through a closed plasma channel (CPC) superconductor, or boson energy transmission system.
Public/Granted literature
- US20160240349A1 Adjustable Mass Resolving Aperture Public/Granted day:2016-08-18
Information query